| Specifications | Technical Data | |||||||||
| Measuring ranges | 13.33Pa、 133.3Pa、 1.333kPa、 13.33kPa、 133.3kPa 0.1Torr、 1Torr、 10Torr、 100Torr、 1000Torr | |||||||||
| Measuring accuracy | 0.5（at23℃）％ of reading | |||||||||
| Zero temperature coefficient | 0.1 | 0.05 | 0.002 (％ of full-scale/℃) | |||||||
| Full-scale temperature coefficient | 0.01 | 0.005 (％ of full-reading/℃) | ||||||||
| Resolution | 0.01 | 0.005 (％ of full-scale) | ||||||||
| Practical detection of lower limit pressure | 0.05% (％ of full-scale) | |||||||||
| Use the lower limit pressure control | 0.5% (％ of full-scale) | |||||||||
| Response speed | 100ms | 30ms | ||||||||
| Max. pressure limit | 130kPa | 200kPa | ||||||||
| power consumption | 0.5 W | |||||||||
| Power supply | 24VDC | |||||||||
| Output signal | 0~10V RS485dataonsignal, supportsupportModbus-RTUprotocol | |||||||||
| Using temperature | 0 ～50 ℃ | |||||||||
| Preservation temperature | 0 ~70 ℃(non-operating: ) | |||||||||
Semiconductor Industry 