NS-PT10
Designed for high-purity process gas delivery systems in the semiconductor industry
Wetted parts: V+V
Application: Semiconductor process gas delivery system, High-purity media transfer system, Electronic specialty gas system
Real-time zero adjustment via potentiometer
| Specifications | Technical Data | |||||||||
| Measuring ranges | -0.1 / 0~0.5...1…5…10…20MPa | |||||||||
| Overload pressures | 200%F.S | |||||||||
| Burst pressures | 300%F.S | |||||||||
| Operational Mode | Gauge Pressure, Absolute Pressure, rough vacuum | |||||||||
| Measuring Media | -20-100℃ no icing | |||||||||
| Output signal | 0~5V 1~5V 0~10V 4~20mA | |||||||||
| Leakage test | 1. 0× 10kPa L/sec(atm STD cc/SEC)complies withSEMI F1 | |||||||||
| Fitting materia | SUS 316LStainless Steel, RA 5(≤0. 13μm) | |||||||||
| Operating voltage | 24VDC(12~32VDC) | |||||||||
| Accuracy | ±0. 25%F. S(typ. ) | |||||||||
| Long-term drift | ≤±0. 1%F. S/-(typ. ) | |||||||||
| Operating temperature range | -20-85℃ no icing | |||||||||
| Insulation resistance | ≥100MΩ(100VDC) | |||||||||
| Vibration resistance | IEC 60068-2-6 (5…2000Hz, 20g) | |||||||||
| Shock resistance | IEC 60068-2-27 (50g, 11ms) | |||||||||
| EMC proof | IEC 61000-6-2/3/4 | |||||||||
Semiconductor Industry