Views: 247 Author: Site Editor Publish Time: 2020-12-15 Origin: Site
Piezoresistive pressure sensor diffusion silicon pressure sensor
The piezoresistive sensor has become a commonly used pressure sensor thanks to the widespread use of MEMS manufacturing technologies.
These make the sensors relatively inexpensive to produce, assuming they do not need specialized packaging to handle dirty or hostile environments.
However, the sensing elements are sensitive to ambient temperature and their response to changes in temperature is not linear.
As a result, the sensors need to be calibrated and their inputs interpreted in the context of temperature.
The use of resistance for measurement also presents the issue of demanding a constant current flow while the sensor is active, which increases system energy requirements that may be troublesome in a mobile or IoT context.