Views:32 Author:Site Editor Publish Time: 2021-03-29 Origin:Site
How (MEMS) Oil-filled-pressure-sensor Work
In MEMS sensor technology, the pressure of the media is measured by a silicon or silicon-on-insulator sensing element that has the piezoresistive strain gage bridge on it, with a transfer medium, typically silicon oil, present between the MEMS element and a stainless-steel diaphragm.
The pressure exerted on the diaphragm is transferred to the MEMS element through the oil. The change in pressure results in a change in electrical output from MEMS elements piezoresistive strain gage. This electrical output gives us an indication of the pressure changes within the system.